With increasing demands for efficiency and product quality plus progress in the integration of automatic control systems in high-cost mechatronic and safety-critical processes, the field of supervision (or monitoring), fault detection and fault diagnosis plays an important role. The book gives an introduction into advanced methods of fault detection and diagnosis (FDD). After definitions of important terms, it considers the reliability, availability, safety and systems integrity of technical processes. Then fault-detection methods for single signals without models such as limit and trend checking and with harmonic and stochastic models, such as Fourier analysis, correlation and wavelets are treated. This is followed by fault detection with process models using the relationships between signals such as parameter estimation, parity equations, observers and principal component analysis. The treated fault-diagnosis methods include classification methods from Bayes classification to neural networks with decision trees and inference methods from approximate reasoning with fuzzy logic to hybrid fuzzy-neuro systems. Several practical examples for fault detection and diagnosis of DC motor drives, a centrifugal pump, automotive suspension and tire demonstrate applications.