Ultraclean Surface Processing of Silicon Wafers

Ultraclean Surface Processing of Silicon Wafers
Author: Takeshi Hattori
Publisher: Springer Science & Business Media
Total Pages: 634
Release: 2013-03-09
Genre: Technology & Engineering
ISBN: 3662035359

A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
Author: Takeshi Hattori
Publisher: The Electrochemical Society
Total Pages: 407
Release: 2009-09
Genre: Semiconductor wafers
ISBN: 1566777429

This issue of ECS Transactions includes papers presented during the 11th International Symposium on Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing held during the ECS Fall Meeting in Vienna, Austria, October 4-9, 2009.

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
Author: Takeshi Hattori
Publisher: The Electrochemical Society
Total Pages: 497
Release: 2007
Genre: Microelectronics
ISBN: 156677568X

This issue covers topics related to the removal of contaminants from and conditioning of Si (SOI), SiC, Ge, SiGe, and III-V semiconductor surfaces; cleaning media, including non-aqueous cleaning methods and tools; front- and back-end cleaning operations; integrated cleaning; cleaning of MEMS; photomasks (reticles); porous low-k dielectrics; post-CMP cleaning; wafer bevel cleaning and polishing; characterization, evaluation, and monitoring of cleaning; correlation with device performance as well as cleaning of equipment and storage and handling hardware. The hardcover edition includes a bonus CD-ROM of Cleaning Technology in Semiconductor Device Manufacturing 1989?2007: Proceedings from the ECS Semiconductor Cleaning Symposia 1?10. This bonus material is not available with the PDF edition.

Photovoltaic Manufacturing

Photovoltaic Manufacturing
Author: Monika Freunek Muller
Publisher: John Wiley & Sons
Total Pages: 154
Release: 2021-08-16
Genre: Science
ISBN: 1119242010

PHOTOVOLTAIC MANUFACTURING This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field. High quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field. This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include: The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost. Photovoltaics are central to any country’s “New Green Deal” and this book shows how to manufacture competitively. The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs. Audience Engineers, chemists, physicists, process technologists, in both academia and industry, that work with photovoltaics and their manufacture.

Cleaning with Solvents: Science and Technology

Cleaning with Solvents: Science and Technology
Author: John Durkee
Publisher: William Andrew
Total Pages: 779
Release: 2013-11-29
Genre: Science
ISBN: 1455731617

High-precision cleaning is required across a wide range of sectors, including aerospace, defense, medical device manufacturing, pharmaceutical processing, semiconductor/electronics, etc. Cleaning parts and surfaces with solvents is simple, effective and low-cost. Although health and safety and environmental concerns come into play with the use of solvents, this book explores how safe and compliant solvent-based cleaning techniques can be implemented. A key to this is the selection of the right solvent. The author also examines a range of newer "green" solvent cleaning options. This book supplies scientific fundamentals and practical guidance supported by real-world examples. Durkee explains the three principal methods of solvent selection: matching of solubility parameters, reduction of potential for smog formation, and matching of physical properties. He also provides guidance on the safe use of aerosols, wipe-cleaning techniques, solvent stabilization, economics, and many other topics. A compendium of blend rules is included, covering the physical, chemical, and environmental properties of solvents. - Three methods explained in detail for substitution of suitable solvents for those unsuitable for any reason: toxic solvents don't have to be tolerated; this volume explains how to do better - Enables users to make informed judgments about their selection of cleaning solvents for specific applications, including solvent replacement decisions - Explains how to plan and implement solvent cleaning systems that are effective, economical and compliant with regulations