Cleaning Technology in Semiconductor Device Manufacturing
Author | : |
Publisher | : The Electrochemical Society |
Total Pages | : 636 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772594 |
Download Cleaning Technology In Semiconductor Device Manufacturing full books in PDF, epub, and Kindle. Read online free Cleaning Technology In Semiconductor Device Manufacturing ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Author | : |
Publisher | : The Electrochemical Society |
Total Pages | : 636 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772594 |
Author | : Jerzy Rużyłło |
Publisher | : The Electrochemical Society |
Total Pages | : 452 |
Release | : 2004 |
Genre | : Technology & Engineering |
ISBN | : 9781566774116 |
Author | : Takeshi Hattori |
Publisher | : Springer Science & Business Media |
Total Pages | : 634 |
Release | : 2013-03-09 |
Genre | : Technology & Engineering |
ISBN | : 3662035359 |
A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
Author | : Richard E. Novak |
Publisher | : The Electrochemical Society |
Total Pages | : 642 |
Release | : 1996 |
Genre | : Technology & Engineering |
ISBN | : 9781566771153 |
Author | : Takeshi Hattori |
Publisher | : The Electrochemical Society |
Total Pages | : 407 |
Release | : 2009-09 |
Genre | : Semiconductor wafers |
ISBN | : 1566777429 |
This issue of ECS Transactions includes papers presented during the 11th International Symposium on Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing held during the ECS Fall Meeting in Vienna, Austria, October 4-9, 2009.
Author | : Jerzy Rużyłło |
Publisher | : The Electrochemical Society |
Total Pages | : 668 |
Release | : 1998 |
Genre | : Technology & Engineering |
ISBN | : 9781566771887 |
Author | : Takeshi Hattori |
Publisher | : The Electrochemical Society |
Total Pages | : 497 |
Release | : 2007 |
Genre | : Microelectronics |
ISBN | : 156677568X |
This issue covers topics related to the removal of contaminants from and conditioning of Si (SOI), SiC, Ge, SiGe, and III-V semiconductor surfaces; cleaning media, including non-aqueous cleaning methods and tools; front- and back-end cleaning operations; integrated cleaning; cleaning of MEMS; photomasks (reticles); porous low-k dielectrics; post-CMP cleaning; wafer bevel cleaning and polishing; characterization, evaluation, and monitoring of cleaning; correlation with device performance as well as cleaning of equipment and storage and handling hardware. The hardcover edition includes a bonus CD-ROM of Cleaning Technology in Semiconductor Device Manufacturing 1989?2007: Proceedings from the ECS Semiconductor Cleaning Symposia 1?10. This bonus material is not available with the PDF edition.
Author | : Monika Freunek Muller |
Publisher | : John Wiley & Sons |
Total Pages | : 154 |
Release | : 2021-08-16 |
Genre | : Science |
ISBN | : 1119242010 |
PHOTOVOLTAIC MANUFACTURING This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field. High quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field. This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include: The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost. Photovoltaics are central to any country’s “New Green Deal” and this book shows how to manufacture competitively. The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs. Audience Engineers, chemists, physicists, process technologists, in both academia and industry, that work with photovoltaics and their manufacture.
Author | : John Durkee |
Publisher | : William Andrew |
Total Pages | : 779 |
Release | : 2013-11-29 |
Genre | : Science |
ISBN | : 1455731617 |
High-precision cleaning is required across a wide range of sectors, including aerospace, defense, medical device manufacturing, pharmaceutical processing, semiconductor/electronics, etc. Cleaning parts and surfaces with solvents is simple, effective and low-cost. Although health and safety and environmental concerns come into play with the use of solvents, this book explores how safe and compliant solvent-based cleaning techniques can be implemented. A key to this is the selection of the right solvent. The author also examines a range of newer "green" solvent cleaning options. This book supplies scientific fundamentals and practical guidance supported by real-world examples. Durkee explains the three principal methods of solvent selection: matching of solubility parameters, reduction of potential for smog formation, and matching of physical properties. He also provides guidance on the safe use of aerosols, wipe-cleaning techniques, solvent stabilization, economics, and many other topics. A compendium of blend rules is included, covering the physical, chemical, and environmental properties of solvents. - Three methods explained in detail for substitution of suitable solvents for those unsuitable for any reason: toxic solvents don't have to be tolerated; this volume explains how to do better - Enables users to make informed judgments about their selection of cleaning solvents for specific applications, including solvent replacement decisions - Explains how to plan and implement solvent cleaning systems that are effective, economical and compliant with regulations