Atomic Layer Deposition (ALD)

Atomic Layer Deposition (ALD)
Author: Jeannie Valdez
Publisher:
Total Pages: 183
Release: 2015
Genre: TECHNOLOGY & ENGINEERING
ISBN: 9781634839204

Atomic layer deposition (ALD) is a thin film deposition technique used in the mass production of microelectronics. In this book, novel nonvolatile memory devices are discussed. The chapters examine the low-temperature fabrication process of single-crystal platinum non-thin films using plasma-enhanced atomic layer deposition (PEALD). A comprehensive review of ALD surface coatings for battery systems is provided, as well as a theoretical calculation on the mechanism of thermal and plasma-enhanced atomic layer deposition of SiO2; and fluorine doping behavior in Zn-based conducting oxide film grown by ALD.

Handbook of Crystal Growth

Handbook of Crystal Growth
Author: Tom Kuech
Publisher: Elsevier
Total Pages: 1384
Release: 2014-11-02
Genre: Science
ISBN: 0444633057

Volume IIIA Basic TechniquesHandbook of Crystal Growth, Second Edition Volume IIIA (Basic Techniques), edited by chemical and biological engineering expert Thomas F. Kuech, presents the underpinning science and technology associated with epitaxial growth as well as highlighting many of the chief and burgeoning areas for epitaxial growth. Volume IIIA focuses on major growth techniques which are used both in the scientific investigation of crystal growth processes and commercial development of advanced epitaxial structures. Techniques based on vacuum deposition, vapor phase epitaxy, and liquid and solid phase epitaxy are presented along with new techniques for the development of three-dimensional nano-and micro-structures.Volume IIIB Materials, Processes, and TechnologyHandbook of Crystal Growth, Second Edition Volume IIIB (Materials, Processes, and Technology), edited by chemical and biological engineering expert Thomas F. Kuech, describes both specific techniques for epitaxial growth as well as an array of materials-specific growth processes. The volume begins by presenting variations on epitaxial growth process where the kinetic processes are used to develop new types of materials at low temperatures. Optical and physical characterizations of epitaxial films are discussed for both in situ and exit to characterization of epitaxial materials. The remainder of the volume presents both the epitaxial growth processes associated with key technology materials as well as unique structures such as monolayer and two dimensional materials.Volume IIIA Basic Techniques - Provides an introduction to the chief epitaxial growth processes and the underpinning scientific concepts used to understand and develop new processes. - Presents new techniques and technologies for the development of three-dimensional structures such as quantum dots, nano-wires, rods and patterned growth - Introduces and utilizes basic concepts of thermodynamics, transport, and a wide cross-section of kinetic processes which form the atomic level text of growth process Volume IIIB Materials, Processes, and Technology - Describes atomic level epitaxial deposition and other low temperature growth techniques - Presents both the development of thermal and lattice mismatched streams as the techniques used to characterize the structural properties of these materials - Presents in-depth discussion of the epitaxial growth techniques associated with silicone silicone-based materials, compound semiconductors, semiconducting nitrides, and refractory materials

Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors
Author: Cheol Seong Hwang
Publisher: Springer Science & Business Media
Total Pages: 266
Release: 2013-10-18
Genre: Science
ISBN: 146148054X

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Chemistry of Atomic Layer Deposition

Chemistry of Atomic Layer Deposition
Author: Seán Thomas Barry
Publisher: Walter de Gruyter GmbH & Co KG
Total Pages: 113
Release: 2021-11-08
Genre: Technology & Engineering
ISBN: 3110712539

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Atomic Layer Deposition

Atomic Layer Deposition
Author: Tommi Kääriäinen
Publisher: John Wiley & Sons
Total Pages: 274
Release: 2013-05-28
Genre: Technology & Engineering
ISBN: 1118062779

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Atomic Layer Deposition in Energy Conversion Applications

Atomic Layer Deposition in Energy Conversion Applications
Author: Julien Bachmann
Publisher: John Wiley & Sons
Total Pages: 366
Release: 2017-03-15
Genre: Technology & Engineering
ISBN: 3527694838

Combining the two topics for the first time, this book begins with an introduction to the recent challenges in energy conversion devices from a materials preparation perspective and how they can be overcome by using atomic layer deposition (ALD). By bridging these subjects it helps ALD specialists to understand the requirements within the energy conversion field, and researchers in energy conversion to become acquainted with the opportunities offered by ALD. With its main focus on applications of ALD for photovoltaics, electrochemical energy storage, and photo- and electrochemical devices, this is important reading for materials scientists, surface chemists, electrochemists, electrotechnicians, physicists, and those working in the semiconductor industry.

Atomic Layer Deposition of Thin Films

Atomic Layer Deposition of Thin Films
Author: David Mark Fryauf
Publisher:
Total Pages: 129
Release: 2016
Genre:
ISBN: 9781369491364

Atomic layer deposition (ALD) is a self-limiting subset of chemical vapor deposition that has become widely popular in materials science applications such as device packaging, semiconductor passivation, transistor gate dielectrics, optical coatings, and protective barriers. ALD is capable of uniformly coating high-aspect ratio features, such as 1-dimensional nanostructures or pinhole-sized vias, across a macroscopic distance which is expected to only be limited by the size of the deposition chamber. This work reviews several applications of ALD used to deposit thin conformal layers of dielectric material which specifically capitalize on the precise, conformal nature of the deposition process. Semiconductor nanowire networks coated with aluminum oxide (AlOx) by plasma enhanced ALD (PEALD) show blue-shifted photoluminescence with increasing AlOx thickness. Novel memristor 0́edge0́+ devices fabricated with an active switching layer of titanium dioxide deposited by PEALD yield an active device cross-section two orders of magnitude smaller than what is possible with conventional 2-dimensional thin film devices fabricated by similar photolithography methods. Protected silver mirrors coated with AlOx deposited by PEALD have superior durability when compared to mirrors coated with an identical layer of AlOx deposited by conventional physical vapor deposition. All of these applications benefit from the robust uniform coating properties of the ALD growth mechanism. Additional studies of dielectric barrier overlayers deposited by ALD on silver mirrors are discussed, and a figure of merit is proposed for judging overall mirror performance.

Chemical Vapor Deposition for Nanotechnology

Chemical Vapor Deposition for Nanotechnology
Author: Pietro Mandracci
Publisher: BoD – Books on Demand
Total Pages: 166
Release: 2019-01-10
Genre: Technology & Engineering
ISBN: 1789849608

Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.

Handbook of Manufacturing Engineering and Technology

Handbook of Manufacturing Engineering and Technology
Author: Andrew Y. C. Nee
Publisher: Springer
Total Pages: 0
Release: 2014-10-31
Genre: Technology & Engineering
ISBN: 9781447146698

The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.

Chemical Vapour Deposition

Chemical Vapour Deposition
Author: Anthony C. Jones
Publisher: Royal Society of Chemistry
Total Pages: 600
Release: 2009
Genre: Science
ISBN: 0854044655

"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket