Atomic Layer Deposition Of Metal Oxide Thin Films
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Author | : Cheol Seong Hwang |
Publisher | : Springer Science & Business Media |
Total Pages | : 266 |
Release | : 2013-10-18 |
Genre | : Science |
ISBN | : 146148054X |
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author | : Shriram Ramanathan |
Publisher | : Springer Science & Business Media |
Total Pages | : 344 |
Release | : 2009-12-03 |
Genre | : Technology & Engineering |
ISBN | : 1441906649 |
Thin Film Metal-Oxides provides a representative account of the fundamental structure-property relations in oxide thin films. Functional properties of thin film oxides are discussed in the context of applications in emerging electronics and renewable energy technologies. Readers will find a detailed description of deposition and characterization of metal oxide thin films, theoretical treatment of select properties and their functional performance in solid state devices, from leading researchers. Scientists and engineers involved with oxide semiconductors, electronic materials and alternative energy will find Thin Film Metal-Oxides a useful reference.
Author | : Mohammad Mansoob Khan |
Publisher | : Springer |
Total Pages | : 403 |
Release | : 2017-09-07 |
Genre | : Science |
ISBN | : 3319624466 |
This book details the chemistry of visible light-induced photocatalysis using different classes of nanocomposites. Starting with a general introduction and explanation of basic principles and mechanisms of (visible) light-induced photocatalysis in the first two chapters (not omitting a plaidoyer for furthering research and development in this promising field), the following chapters detail the different types and classes of nanocomposites currently used in light-induced photocatalytic applications, including e.g. metal and mixed metal-oxide nanoparticles and –composites, nanoporous materials, polymeric and carbon-based nanocomposites. They explain the characteristics and importance of the different types of nanocomposites, as well as their synthesis and fabrication.In the end of the book an outlook on the unique applications of novel nanocomposites is offered, for example in water treatment and disinfection and removal of pollutants from wastewater, self-cleaning window panes based on photoactive materials, and many more. The book also addresses the challenges in present photocatalytic research, and therefore is a must-read for everybody interested in the developing field of nanocomposites and visible light-induced photocatalysis.
Author | : Pietro Mandracci |
Publisher | : BoD – Books on Demand |
Total Pages | : 166 |
Release | : 2019-01-10 |
Genre | : Technology & Engineering |
ISBN | : 1789849608 |
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.
Author | : Tommi Kääriäinen |
Publisher | : John Wiley & Sons |
Total Pages | : 274 |
Release | : 2013-05-28 |
Genre | : Technology & Engineering |
ISBN | : 1118062779 |
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Author | : Nathan J Patmore |
Publisher | : Royal Society of Chemistry |
Total Pages | : 210 |
Release | : 2018-11-16 |
Genre | : Science |
ISBN | : 1788010671 |
With the increase in volume, velocity and variety of information, researchers can find it difficult to keep up to date with the literature in their field. Providing an invaluable resource, this volume contains analysed, evaluated and distilled information on the latest in organometallic chemistry research and emerging fields. The reviews range in scope and include π-coordinated arene metal complexes and catalysis by arene exchange, rylenes as chromophores in catalysts for CO2 photoreduction, metal nodes and metal sites in metal–organic frameworks, developments in molecular precursors for CVD and ALD, and multiphoton luminescence processes in f-element containing compounds.
Author | : Andrew Y. C. Nee |
Publisher | : Springer |
Total Pages | : 0 |
Release | : 2014-10-31 |
Genre | : Technology & Engineering |
ISBN | : 9781447146698 |
The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.
Author | : Wilfried G. J. H. M. van Sark |
Publisher | : Springer Science & Business Media |
Total Pages | : 588 |
Release | : 2011-11-16 |
Genre | : Technology & Engineering |
ISBN | : 3642222757 |
Today’s solar cell multi-GW market is dominated by crystalline silicon (c-Si) wafer technology, however new cell concepts are entering the market. One very promising solar cell design to answer these needs is the silicon hetero-junction solar cell, of which the emitter and back surface field are basically produced by a low temperature growth of ultra-thin layers of amorphous silicon. In this design, amorphous silicon (a-Si:H) constitutes both „emitter“ and „base-contact/back surface field“ on both sides of a thin crystalline silicon wafer-base (c-Si) where the electrons and holes are photogenerated; at the same time, a-Si:H passivates the c-Si surface. Recently, cell efficiencies above 23% have been demonstrated for such solar cells. In this book, the editors present an overview of the state-of-the-art in physics and technology of amorphous-crystalline heterostructure silicon solar cells. The heterojunction concept is introduced, processes and resulting properties of the materials used in the cell and their heterointerfaces are discussed and characterization techniques and simulation tools are presented.
Author | : Anthony C. Jones |
Publisher | : Royal Society of Chemistry |
Total Pages | : 600 |
Release | : 2009 |
Genre | : Science |
ISBN | : 0854044655 |
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Author | : Theodor Schneller |
Publisher | : Springer Science & Business Media |
Total Pages | : 801 |
Release | : 2014-01-24 |
Genre | : Technology & Engineering |
ISBN | : 3211993118 |
This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.