Analysis Of The Combined Mode Resonance In Aluminum Nitride Mems Resonators
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| Author | : Harmeet Bhugra |
| Publisher | : Springer |
| Total Pages | : 423 |
| Release | : 2017-01-09 |
| Genre | : Technology & Engineering |
| ISBN | : 3319286889 |
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
| Author | : Vikas Choudhary |
| Publisher | : CRC Press |
| Total Pages | : 481 |
| Release | : 2017-12-19 |
| Genre | : Medical |
| ISBN | : 135183228X |
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
| Author | : Philip Jason Stephanou |
| Publisher | : |
| Total Pages | : 404 |
| Release | : 2006 |
| Genre | : |
| ISBN | : |
| Author | : G. Di Francia |
| Publisher | : Springer Nature |
| Total Pages | : 411 |
| Release | : 2020-02-21 |
| Genre | : Technology & Engineering |
| ISBN | : 3030375587 |
This book showcases the state of the art in the field of sensors and microsystems, revealing the impressive potential of novel methodologies and technologies. It covers a broad range of aspects, including: bio-, physical and chemical sensors; actuators; micro- and nano-structured materials; mechanisms of interaction and signal transduction; polymers and biomaterials; sensor electronics and instrumentation; analytical microsystems, recognition systems and signal analysis; and sensor networks, as well as manufacturing technologies, environmental, food and biomedical applications. The book gathers a selection of papers presented at the 20th AISEM National Conference on Sensors and Microsystems, held in Naples, Italy in February 2019, the event brought together researchers, end users, technology teams and policy makers.
| Author | : Alper Erturk |
| Publisher | : John Wiley & Sons |
| Total Pages | : 377 |
| Release | : 2011-04-04 |
| Genre | : Technology & Engineering |
| ISBN | : 1119991358 |
The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.
| Author | : Silvan Schmid |
| Publisher | : Springer |
| Total Pages | : 183 |
| Release | : 2016-06-21 |
| Genre | : Technology & Engineering |
| ISBN | : 3319286919 |
This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.
| Author | : Ulrich Schmid |
| Publisher | : MDPI |
| Total Pages | : 177 |
| Release | : 2018-07-10 |
| Genre | : Technology & Engineering |
| ISBN | : 3038970050 |
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
| Author | : Shad Roundy |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 219 |
| Release | : 2012-12-06 |
| Genre | : Technology & Engineering |
| ISBN | : 1461504856 |
The vast reduction in size and power consumption of CMOS circuitry has led to a large research effort based around the vision of wireless sensor networks. The proposed networks will be comprised of thousands of small wireless nodes that operate in a multi-hop fashion, replacing long transmission distances with many low power, low cost wireless devices. The result will be the creation of an intelligent environment responding to its inhabitants and ambient conditions. Wireless devices currently being designed and built for use in such environments typically run on batteries. However, as the networks increase in number and the devices decrease in size, the replacement of depleted batteries will not be practical. The cost of replacing batteries in a few devices that make up a small network about once per year is modest. However, the cost of replacing thousands of devices in a single building annually, some of which are in areas difficult to access, is simply not practical. Another approach would be to use a battery that is large enough to last the entire lifetime of the wireless sensor device. However, a battery large enough to last the lifetime of the device would dominate the overall system size and cost, and thus is not very attractive. Alternative methods of powering the devices that will make up the wireless networks are desperately needed.
| Author | : Dominik G. Rabus |
| Publisher | : Springer |
| Total Pages | : 270 |
| Release | : 2007-04-26 |
| Genre | : Science |
| ISBN | : 3540687882 |
The optical filter is resonator based. The required passband shape of ring resonator-filters can be custom designed by the use of configurations of various ring coupled resonators. This book describes the current state-of-the-art on these devices. It provides an in-depth knowledge of the simulation, fabrication and characterization of ring resonators for use as example filters, lasers, sensors.
| Author | : Oliver Brand |
| Publisher | : John Wiley & Sons |
| Total Pages | : 512 |
| Release | : 2015-04-22 |
| Genre | : Technology & Engineering |
| ISBN | : 352767635X |
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
