Advanced Interconnects And Contact Materials And Processes For Future Integrated Circuits Volume 514
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Author | : S. P. Murarka |
Publisher | : |
Total Pages | : 596 |
Release | : 1998-11-02 |
Genre | : Technology & Engineering |
ISBN | : |
Comprising the proceedings of an MRS symposium held in April of 1998, contributions in this volume are divided into ten sections: interconnection frontiers; aluminum interconnects; cobalt and other silicides; titanium silicide; MOSFET, source, drain, and interconnect engineering; copper interconnects and barriers; a poster session on advanced interconnects and contacts; contacts to compound semiconductor devices; novel interconnect materials and schemes; and diffusion barriers. Annotation copyrighted by Book News, Inc., Portland, OR
Author | : Daniel C. Edelstein |
Publisher | : |
Total Pages | : 606 |
Release | : 1999-10-07 |
Genre | : Technology & Engineering |
ISBN | : |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author | : Electrochemical Society. Dielectric Science and Technology Division |
Publisher | : |
Total Pages | : 290 |
Release | : 1999 |
Genre | : Science |
ISBN | : |
Author | : M. Matlosz |
Publisher | : The Electrochemical Society |
Total Pages | : 456 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772563 |
Author | : |
Publisher | : |
Total Pages | : 1074 |
Release | : 1999 |
Genre | : Electroluminescent devices |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : 752 |
Release | : 1999 |
Genre | : Ions |
ISBN | : |
Author | : Richard Vinci |
Publisher | : Mrs Proceedings |
Total Pages | : 576 |
Release | : 2000-09-25 |
Genre | : Science |
ISBN | : |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author | : |
Publisher | : |
Total Pages | : 296 |
Release | : 1999 |
Genre | : Catalysts |
ISBN | : |
Author | : Easo P. George |
Publisher | : |
Total Pages | : 864 |
Release | : 1999-07-19 |
Genre | : Technology & Engineering |
ISBN | : |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author | : S. A. Ringel |
Publisher | : |
Total Pages | : 338 |
Release | : 1999-08-11 |
Genre | : Technology & Engineering |
ISBN | : |
This book contains the proceedings of two symposia - 'Integration of Dissimilar Materials in Micro- and Optoelectronics' and 'III-V and SiGe Group IV Device/IC Processing Challenges for Commercial Applications'. The publication stems from the desire to achieve new levels of device functionality and higher levels of performance via integration of devices based on dissimilar semiconductors, where the constraint of lattice-matching on the breadth of attainable devices can be reduced. It covers fundamental topics germane to integration of a wide range of dissimilar materials spanning wide-bandgap III-V nitrides, III-V/Si integration, II-VI and II-VI/III-V compounds, heterovalent structures, oxides, photonic bandgap structures and others. Topics such as compliancy, dislocation control, selective area growth, bonding methodologies, etc. are featured. It also addresses processing issues in the manufacturing of III-V and Si-based heterostructures for commercial products. Here, the success enjoyed by silicon germanium technology is contrasted by the promise of silicon-carbon alloys which have opportunities and challenges for the new generation of process developers.